Provided is a non-ionic photoacid generator having high i-line photosensitivity, excellent heat-resistant stability, and excellent solubility in hydrophobic materials. The present invention is a non-ionic photoacid generator (A) that is characterized by being expressed by general formula (1).
[In formula (1), R1 and R2 each independently represents an alkyl group having 1-18 carbons or a fluoroalkyl group having 1-18 carbons, an alkenyl group having 2-18 carbons, an alkynyl group having 2-18 carbons, an aryl group having 6-18 carbons, a silyl group, or the like; m and n respectively represent the number of R1s and R2s, each number being an integer from 0 to 3, and the total number (m+n) of R1s and R2s being an integer from 1 to 6. The m number of R1s and the n number of R2s may each be the same or different. R3 represents a hydrocarbon having 1-18 carbons (wherein one part or all of the hydrogen may be substituted by fluorine).]
本发明提供了一种具有高 i 线光敏性、优异的耐热稳定性和在疏
水材料中优异的溶解性的非离子光酸发生器。本发明是一种非离子光酸发生器(A),其特征在于由通式(1)表示。
式(1)中,R1 和 R2 各自独立地代表具有 1-18 个碳原子的烷基或具有 1-18 个碳原子的氟烷基、具有 2-18 个碳原子的烯基、具有 2-18 个碳原子的炔基、具有 6-18 个碳原子的芳基、
硅烷基或类似基团;m 和 n 分别代表 R1s 和 R2s 的数目,每个数目均为 0 至 3 的整数,R1s 和 R2s 的总数(m+n)为 1 至 6 的整数。R1 的 m 个数和 R2 的 n 个数可以相同,也可以不同。R3 代表具有 1-18 个碳原子的烃类(其中部分或全部氢可被
氟取代)]。