An anti-reflective coating film is formed by applying on a chemically amplified photoresist film an anti-reflective coating composition comprising an alkali-soluble fluorine-containing polymer, an acid, an amine and a solvent capable of dissolving these components and having a pH of 7 or less. The formed anti-reflective coating film can serve to prevent multiple reflections within the photoresist film, increase the amount of reduction in thickness of the photoresist film upon development with a developer after exposure, and form a pattern having a rectangular cross-sectional pattern and not having T-top or round top.
通过在
化学放大的光刻胶膜上涂敷由碱溶性含
氟聚合物、酸、胺和能溶解这些成分且 pH 值小于或等于 7 的溶剂组成的防反射涂层组合物,可形成防反射涂层膜。形成的防反射涂膜可防止光刻胶膜内的多重反射,增加曝光后用显影剂显影时光刻胶膜厚度的减少量,并形成具有矩形横截面图案而不具有 T 形顶或圆形顶的图案。