申请人:Hahnfeld L Jerry
公开号:US20070027280A1
公开(公告)日:2007-02-01
A compound useful in the formation of polymeric dielectric films for semiconductor devices and the resulting cured films and devices, said compound comprising i) three or more dienophile groups (A-functional groups) and ii) a single ring structure comprising two conjugated carbon-to-carbon double bonds and a leaving group L (collectively referred to as a B-functional group), characterized in that one A-functional group of one molecule of the compound is capable of reaction under cycloaddition reaction conditions with the B-functional group of a second molecule and elimination of the leaving group L, to thereby form a polymer.
该化合物在半导体器件的聚合介电膜的形成以及所得到的固化膜和器件中有用,该化合物包括:i) 三个或更多的二烯基基团(A-官能团),和ii) 一个单环结构,其中包括两个共轭的碳-碳双键和一个离去基团L(统称为B-官能团)。其特征在于,该化合物的一个分子的一个A-官能团能够在环加成反应条件下与第二个分子的B-官能团发生反应并消除离去基团L,从而形成聚合物。