There is provided an acid having a fluorine-containing carbanion structure or a salt having a fluorine-containing carbanion structure, which is represented by the following general formula (1).
By using a photoacid generator for chemically amplified resist materials that generates this acid, it is possible to provide a photoacid generator which has a high sensitivity to the ArF excimer laser light or the like, of which acid (photo generated acid) to be generated has a sufficiently high acidity, and which has a high dissolution in resist solvent and a superior compatibility with resin, and a resist material containing such a photoacid generator.
提供了一种具有含
氟碳阴离子结构的酸或含有含
氟碳阴离子结构的盐,其表示为以下一般式(1)。通过使用生成此酸的
化学增感抗蚀材料的光酸发生剂,可以提供一种对ArF准分子激光等具有高灵敏度的光酸发生剂,其生成的酸(光生成酸)具有足够高的酸度,并且具有与
树脂的高溶解度和优越的相容性,以及包含这样的光酸发生剂的抗蚀材料。