A high resolution resist material comprising an acid generator is provided so that high sensitivity and high resolution for high energy rays of 300 nm or less, small line-edge roughness, and excellence in heat stability and storage stability are obtained. Moreover, a pattern formation method using this resist material are provided. Specifically, a novel compound of the following general formula (1); and a positive resist material comprising this compound preferably as a photo acid generator, and a base resin; are provided. This positive resist material may contain a basic compound or a dissolution inhibitor. Further, the present invention provides a pattern formation method comprising the steps of applying this positive resist material on a substrate, then heat-treating the material, exposing the treated material to a high energy ray having a wavelength of 300 nm or less via a photo mask, optionally heat-treating the exposed material, and developing the material using a developer.
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本研究提供了一种由酸发生器组成的高分辨率抗蚀剂材料,从而获得了对 300 纳米或更小的高能射线的高灵敏度和高分辨率,线边粗糙度小,热稳定性和储存稳定性优异。此外,还提供了一种使用这种抗蚀剂材料的图案形成方法。具体地说,本发明提供了以下通式(1)的新型化合物;以及由该化合物(最好作为光酸发生剂)和碱
树脂组成的正抗蚀剂材料。这种正抗蚀剂材料可以含有碱性化合物或溶解
抑制剂。此外,本发明还提供了一种图案形成方法,包括以下步骤:将这种正抗蚀剂材料涂在基底上,然后对材料进行热处理,通过光罩将处理后的材料暴露于波长为 300 纳米或以下的高能射线下,可选择对暴露的材料进行热处理,以及使用显影剂对材料进行显影。
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