An anti-reflection coating-forming composition is provided. This composition includes a polymer and a solvent. The polymer has a structural unit represented by the formula (1):
1
wherein R
1
is a monovalent atom other than a hydrogen atom or a monovalent group, and n is an integer of 0-4, provided that when n is an integer of 2-4, a plural number of R
1
's are the same or different; R
2
and R
3
are each a monovalent atom or group; and X is a bivalent group. The anti-reflection coating formed from this composition has a high antireflective effect, does not generate intermixing with a resist film, and enables a good resist pattern profile excellent in resolution and precision in cooperation with a positive or negative resist.
提供了一种抗反射涂层形成组合物。这种组合物包括一种聚合物和一种溶剂。聚合物具有由式(1)表示的结构单元:
1
其中 R
1
是氢原子或一价基团以外的一价原子,n 是 0-4 的整数,但当 n 是 2-4 的整数时,R
1
的复数相同或不同;R
2
和 R
3
均为一价原子或基团;X 为二价基团。由这种组合物形成的抗反射涂层具有很高的抗反射效果,不会与抗蚀剂薄膜产生混杂,并且在与正极或负极抗蚀剂配合使用时,可以形成分辨率和精度极佳的抗蚀图案轮廓。
Stereochemistry of the Addition of Bromine to Acenaphthylene Derivatives: Substituent and Solvent Effects
作者:Valeriy F. Anikin、Vera V. Veduta、Andreas Merz
DOI:10.1007/pl00010249
日期:1999.5
Anikin; Kokorovets; Veduta, Russian Journal of Organic Chemistry, 1998, vol. 34, # 5, p. 673 - 675