1,1,1-Trichloro- and tribromo polyfluoroalkanes have been synthesized from perfluoroalkyl iodides and anhydrous aluminum chloride and bromide respectively. The reaction is also applicable to perfluoroalkylether iodides, though varying amounts of by-products are formed depending on the structure of the starting iodide.
There is provided an improved solvent especially adapted for cleaning silicon wafers and consisting essentially of a haloalkylhydrocarbon and a partially fluorinated alcohol. This solvent provides excellent cleaning and drying of the wafer.