Provided are: a non-ionic photoacid generator containing a sulfonate compound having a high photosensitivity to i lines, exhibiting excellent heat-resistance stability, and exhibiting excellent solubility in a hydrophobic material; and a resin composition for photolithography containing the same. The present invention is a sulfonate compound characterized by being represented by general formula (1).
[In formula (1), R1 represents an aryl group having 6 to 18 carbon atoms or a heterocyclic hydrocarbon group having 4 to 20 carbon atoms. R2 represents a hydrogen atom, an alkyl group having 1 to 18 carbon atoms, an alkenyl group having 2 to 18 carbon atoms, an alkynyl group having 2 to 18 carbon atoms, or an aryl group having 6 to 18 carbon atoms. R3 represents a hydrocarbon group having 1 to 18 carbon atoms (in which some or all hydrogen atoms may be substituted with fluorine).]
本发明提供了:一种非离子型光酸发生器,该发生器含有对 i 线具有高光敏感性的
磺酸盐化合物,具有优异的耐热稳定性,并且在疏
水性材料中具有优异的溶解性;以及一种含有该
磺酸盐化合物的光刻用
树脂组合物。本发明是一种
磺酸盐化合物,其特征在于由通式(1)表示。
式(1)中,R1 代表具有 6 至 18 个碳原子的芳基或具有 4 至 20 个碳原子的杂
环烃基。R2 代表氢原子、具有 1 至 18 个碳原子的烷基、具有 2 至 18 个碳原子的烯基、具有 2 至 18 个碳原子的炔基或具有 6 至 18 个碳原子的芳基。R3 代表具有 1 至 18 个碳原子的烃基(其中部分或全部氢原子可被
氟取代)。