全氟辛酸四甲铵盐 | 32609-65-7

• 分子结构分类: 有机化合物 - 有机卤素化合物 - 卤代烷
• 中文名称: 全氟辛酸四甲铵盐
• 英文名称: Perfluorooctanoate N,N,N-trimethylmethanaminium
• 英文别名: 2,2,3,3,4,4,5,5,6,6,7,7,8,8,8-pentadecafluorooctanoate;tetramethylazanium
• CAS: 32609-65-7
• 化学式: C12H12F15NO2
• 分子量: 487.2
• InChiKey: IDXNJDWGFALBDP-UHFFFAOYSA-M

计算性质

• 辛醇/水分配系数(LogP)：
  3.43
• 重原子数：
  30
• 可旋转键数：
  5
• 环数：
  0.0
• sp3杂化的碳原子比例：
  0.92
• 拓扑面积：
  40.1
• 氢给体数：
  0
• 氢受体数：
  17

反应信息

• 作为产物：
  描述：

  四甲基氢氧化铵五水合物 、 全氟辛酸 以 水 为溶剂， 以to form tetra methylammonium perfluorooctanoate at a concentration of 5 percent by weight of the solution的产率得到全氟辛酸四甲铵盐
  参考文献：
  名称：

  Top antireflective coating film

  摘要：

  利用含氟的顶部抗反射涂层，其折射率约等于底层光刻胶的平方根，并且可在光刻胶的显影剂中去除，以提高水可开发光刻胶组合物的图案转移保真度。

  公开号：

  US06057080A1

文献信息

• Antireflective coating films
  申请人：International Business Machines Corporation

  公开号：US05744537A1

  公开（公告）日：1998-04-28

  Enhanced fidelity of pattern transfer of aqueous developable photoresist compositions is achieved with top antirefective coatings which are fluorine-containing and have a refractive index approximately equal to the square root of the underlying photoresist and which are removable in the developer for the photoresist.

  采用具有含氟的顶部抗反射涂层，其折射率大约等于底部光刻胶的平方根并且可以在光刻胶开发剂中去除，可以提高水溶性光刻胶组合物的图案转移的保真度。
• Top coating composition for photoresist and method of forming photoresist pattern using same
  申请人：Hata Mitsuhiro

  公开号：US20060111550A1

  公开（公告）日：2006-05-25

  Top coating compositions capable of being used in immersion lithography, and methods of forming photoresist patterns using the same, are provided. The top coating composition includes: a polymer, a base; and a solvent, wherein the polymer may be represented by Formula I: wherein R 1 and R 2 are independently selected from the group consisting of hydrogen, fluoro, methyl, and trifluoromethyl; X is a carboxylic acid group or a sulfonic acid group; Y is a carboxylic acid group or a sulfonic acid group, wherein the carboxylic acid group or sulfonic acid group is protected; Z is a monomer selected from the group consisting of a vinyl monomer, an alkyleneglycol, a maleic anhydride, an ethyleneimine, an oxazoline-containing monomer, acrylonitrile, an allylamide, a 3,4-dihydropyran, a 2,3-dihydrofuran, tetrafluoroethylene, or a combination thereof; and m, n, and q are integers wherein 0.03≦m/(m+n+q)≦0.97, 0.03≦n/(m+n+q)≦0.97, 0≦q/(m+n+q)≦0.5; and wherein the solvent includes deionized water.
• US7384730B2
  申请人：——

  公开号：US7384730B2

  公开（公告）日：2008-06-10