In a humidity sensor device comprising a pair of opposed electrodes disposed on an insulating substrate to define a gap therebetween and a humidity sensitive thin film lying on the gap, the humidity sensitive thin film is a thin film comprising a polymer or copolymer obtained from a monomer of formula (1), and formation of the humidity sensitive thin film is optionally combined with treatment of the insulating substrate by physical means. A humidity sensor device for detecting and determining moisture in the surrounding atmosphere which has improved water resistance, solvent resistance, and gas resistance, and exhibits stable output performance in a wide humidity region without hysteresis is provided as well as a method for preparing the same.
In formula (1), A11 is a divalent group, R11 to R14 are alkyl, Y11 and Y12 are monovalent groups terminated with an ethylenically unsaturated reactive group, any two or more of R11 to R14, Y11, Y12, A11 and portions thereof adjoining the nitrogen (N) atom may bond together to form a ring with the nitrogen (N) atom, and X11- and X12- are anions.
在一种湿度传感器装置中,包括一对设置在绝缘基板上以在其间形成间隙的对置电极和位于间隙上的湿度敏感薄膜,湿度敏感薄膜是由从式(1)单体中获得的聚合物或共聚物构成的薄膜,湿度敏感薄膜的形成可选择与通过物理方法处理绝缘基板相结合。本发明提供了一种用于检测和确定周围环境湿度的湿度传感器装置,该装置具有更好的耐
水性、耐溶剂性和耐气体性,并且在较宽的湿度区域内具有稳定的输出性能,没有滞后现象。
在式 (1) 中,A11 是二价基团,R11 至 R14 是烷基,Y11 和 Y12 是以
乙烯基不饱和反应基团终止的单价基团,R11 至 R14、Y11、Y12、A11 中的任意两个或两个以上及其与氮(N)原子相邻的部分可键合在一起与氮(N)原子形成环,X11- 和 X12- 是阴离子。