[EN] NOVEL DIAZONAPHTHOQUINONESULFONIC ACID BISPHENOL DERIVATIVE USEFUL IN PHOTO LITHOGRAPHIC SUB MICRON PATTERNING AND A PROCESS FOR PREPARATION THEREOF [FR] NOUVEAU DÉRIVÉ ESTER D'ACIDE DIAZONAPHTOQUINONESULFONIQUE ET DE BISPHÉNOL UTILE DANS LA FORMATION DE MOTIFS SUBMICRONIQUES PHOTOLITHOGRAPHIQUES ET SON PROCÉDÉ DE PRÉPARATION
NOVEL DIAZONAPHTHOQUINONESULFONIC ACID BISPHENOL DERIVATIVE USEFUL IN PHOTO LITHOGRAPHIC SUB MICRON PATTERNING AND A PROCESS FOR PREPARATION THEREOF
申请人:Reddy Vummadi Venkat
公开号:US20100081084A1
公开(公告)日:2010-04-01
The present invention provides novel diazonaphthoquinonesulfonic acid bisphenol derivatives. More particularly, the present invention relates to photo restive coating comprising alkali-soluble resin, a photoactive compound and a surfactant. The photoresist film prepared has less then one micron. The photoactive compound is soluble or swellable in aqueous alkaline solutions and is diazonaphthoquinonesulfonic bisphenol esters of the general formula (A), wherein DNQ represents a 2-Diazo-1-naphthoquinone-4-sulfonyl, 2-Diazo-1-naphthoquinone-5-sulfonyl, 1-Diazo-2-naphthoquinone-4-sulfonyl groups and R1 R1 represents an alkyl, aryl and substituted aryl groups. The invention also provides a process for coating and imaging the light-sensitive composition.
NOVEL DIAZONAPHTHOQUINONESULFONIC ACID BISPHENOL DERIVATIVE USEFUL IN PHOTO LITHOGRAPHIC SUB MICRON PATTERNING AND A PROCESS FOR PREPARATION THEREOF
申请人:Council of Scientific & Industrial Research
公开号:EP2137140B1
公开(公告)日:2010-11-10
US8563215B2
申请人:——
公开号:US8563215B2
公开(公告)日:2013-10-22
[EN] NOVEL DIAZONAPHTHOQUINONESULFONIC ACID BISPHENOL DERIVATIVE USEFUL IN PHOTO LITHOGRAPHIC SUB MICRON PATTERNING AND A PROCESS FOR PREPARATION THEREOF<br/>[FR] NOUVEAU DÉRIVÉ ESTER D'ACIDE DIAZONAPHTOQUINONESULFONIQUE ET DE BISPHÉNOL UTILE DANS LA FORMATION DE MOTIFS SUBMICRONIQUES PHOTOLITHOGRAPHIQUES ET SON PROCÉDÉ DE PRÉPARATION