申请人:MITSUBISHI GAS CHEMICAL COMPANY, INC.
公开号:EP0269949A2
公开(公告)日:1988-06-08
A process for production of high purity quaternary ammonium hydroxides, comprising electrolyzing quaternary ammonium hydrogencarbonates represented by the general formula:
(wherein the symbols are as defined in the appended claims) in an electrolytic cell comprising an anode compartment and a cathode compartment defined by a cation exchange membrane. In accordance with this process, high purity quaternary ammonium hydroxides can be produced with high electrolytic efficiency and further without causing corrosion of equipment. Since the quaternary ammonium hydroxides produced by the present invention are of high purity, they can be effectively used as, for example, cleaners, etchants or developers for wafers in the production of IC and LSI in the field of electronics and semiconductors.
一种生产高纯度季铵氢氧化物的工艺,包括在一个由阳离子交换膜限定的阳极室和阴极室组成的电解槽中电解通式如下的季铵碳酸氢盐:
(其中符号与所附权利要求中定义的相同)的电解槽中进行电解,该电解槽由阳离子交换膜确定的阳极室和阴极室组成。根据这种工艺,可以生产出高纯度的季铵氢氧化物,电解效率高,而且不会对设备造成腐蚀。由于本发明生产的季铵氢氧化物纯度高,因此可有效地用作电子和半导体领域集成电路和 LSI 生产中晶片的清洁剂、蚀刻剂或显影剂等。