申请人:MITSUBISHI GAS CHEMICAL COMPANY, INC.
公开号:EP1666970A1
公开(公告)日:2006-06-07
The compound of the present invention is represented by the following formula 1:
wherein R1, R2, R4, R5, m0 to m2, and n0 to n2 are as defined in the description. Radiation sensitive compositions containing the compound of the formula 1 as a main component of the solid component are excellent in sensitivity, resolution, heat resistance, etching resistance, and solubility in solvent.
本发明的化合物由下式 1 表示:
其中 R1、R2、R4、R5、m0 至 m2 和 n0 至 n2 如说明中所定义。含有式 1 所示化合物作为固体组分主要成分的辐射敏感性组合物在敏感性、分辨率、耐热性、抗蚀刻性和溶剂溶解性方面都非常出色。