Developable bottom antireflective coating compositions are provided.
提供可开发底部防反射涂层组合物。
COATING COMPOSITIONS
申请人:HOULIHAN Francis
公开号:US20130236833A1
公开(公告)日:2013-09-12
Developable bottom antireflective coating compositions are provided.
提供可开发的底部防反射涂层组合物。
US8455176B2
申请人:——
公开号:US8455176B2
公开(公告)日:2013-06-04
US9146467B2
申请人:——
公开号:US9146467B2
公开(公告)日:2015-09-29
[EN] COATING COMPOSITIONS<br/>[FR] COMPOSITIONS DE REVÊTEMENT
申请人:AZ ELECTRONIC MATERIALS USA
公开号:WO2010055406A2
公开(公告)日:2010-05-20
An antireflective coating composition comprises a polymer having a dye or chromophore moiety and crosslinking functionality, an optional crosslinking component, and one or more photoactive compounds having the formula W-(L-(G))p where W is PAG or Q, where PAG is a photoacid generator and Q is a quencher; each L is a direct bond or a linking group; each G is independently G1 or G2; G1 is OH; G2 is OCH=CH2; p is 1 to 12.