申请人:JSR Corporation
公开号:EP2623558A1
公开(公告)日:2013-08-07
A radiation-sensitive resin composition includes: a polymer having a first structural unit derived from a compound represented by a formula (1), and a second structural unit derived from a compound represented by a formula (2); an acid generator; and an organic solvent. In the formula (1), R1 represents a ring structure having 3 to 8 carbon atoms taken together with a carbon atom constituting a lactone ring; R2 represents a fluorine atom, a hydroxyl group or an organic group having 1 to 20 carbon atoms; and a is an integer of 0 to 6. In a case where a is 2 or greater, a plurality of R2s are identical or different, or represent a ring structure taken together with each other. At least one group of R1 and R2 has a hetero atom or a halogen atom.
一种辐射敏感树脂组合物包括:一种聚合物,其第一结构单元由式(1)表示的化合物衍生而来,第二结构单元由式(2)表示的化合物衍生而来;一种酸发生器;以及一种有机溶剂。在式 (1) 中,R1 代表具有 3 至 8 个碳原子的环结构,与一个碳原子一起构成内酯环;R2 代表氟原子、羟基或具有 1 至 20 个碳原子的有机基团;a 为 0 至 6 的整数。在 a 为 2 或更大的情况下,多个 R2 相同或不同,或彼此代表一个环结构。R1 和 R2 中至少有一个基团具有杂原子或卤原子。