申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US10023674B2
公开(公告)日:2018-07-17
A monomer having a substituent group capable of polarity switch under the action of acid is provided. A useful polymer is obtained by polymerizing the monomer. A resist composition comprising the polymer has improved development properties and is processed to form a negative pattern having high resolution and etch resistance which is insoluble in alkaline developer.
本发明提供了一种单体,其取代基在酸的作用下可进行极性转换。通过聚合该单体可获得有用的聚合物。包含该聚合物的抗蚀剂组合物具有更好的显影性能,经加工可形成具有高分辨率和抗蚀刻性的阴图,且不溶于碱性显影剂。