Provided is a photosensitive composition including a radically polymerizable compound, a photoradical polymerization initiator, and at least one selected from a chain transfer agent or a radical trapping agent.
[EN] RESIST UNDERLAYER FILM-FORMING COMPOSITION CONTAINING RADICAL TRAPPING AGENT<br/>[FR] COMPOSITION FILMOGÈNE DE SOUS-COUCHE DE RÉSERVE CONTENANT UN AGENT DE PIÉGEAGE DE RADICAUX<br/>[JA] ラジカルトラップ剤を含むレジスト下層膜形成組成物