[EN] METHODS OF CLEANING SEMICONDUCTOR DEVICES AT THE BACK END OF LINE USING AMIDOXIME COMPOSITIONS<br/>[FR] PROCÉDÉS DE NETTOYAGE DE DISPOSITIFS À SEMI-CONDUCTEURS EN EXTRÉMITÉ ARRIÈRE DE LIGNE, FAISANT APPEL À DES COMPOSITIONS À BASE D'AMIDOXIME
申请人:EKC TECHNOLOGY INC
公开号:WO2009058278A1
公开(公告)日:2009-05-07
The present invention relates to aqueous compositions comprising amidoxime compounds and methods for cleaning plasma etch residue from semiconductor substrates including such dilute aqueous solutions. The compositions of the invention may optionally contain one or more other acid compounds, one or more basic compounds, and a fluoride-containing compound and additional components such as organic solvents, chelating agents, amines, and surfactants. The invention also relates to a method of removing residue from a substrate during integrated circuit fabrication.