The invention provides a compound for forming an organic film having a partial structure represented by the following formula (ii),
wherein the ring structures Ar1, Ar2 and Ar3 each represent a substituted or unsubstituted benzene ring or naphthalene ring; e is 0 or 1; R0 represents a hydrogen atom or a linear, branched or cyclic monovalent organic group having 1 to 30 carbon atoms; L0 represents a linear, branched or cyclic divalent organic group having 1 to 32 carbon atoms; and the methylene group constituting L0 may be substituted by an oxygen atom or a carbonyl group. There can be provided an organic film composition for forming an organic film having high dry etching resistance as well as advanced filling/planarizing characteristics.
本发明提供了一种用于形成有机薄膜的化合物,其部分结构由下式(ii)表示、
其中,环结构 Ar1、Ar2 和 Ar3 分别代表取代或未取代的苯环或
萘环;e 为 0 或 1;R0 代表氢原子或具有 1 至 30 个碳原子的线性、支链或环状一价有机基团;L0 代表具有 1 至 32 个碳原子的线性、支链或环状二价有机基团;构成 L0 的亚甲基可被氧原子或羰基取代。本发明可提供一种有机薄膜组合物,用于形成具有高抗干蚀刻性和高级填充/平面化特性的有机薄膜。