A resist composition including a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the acid-generator component (B) including an acid generator (B1) consisting of a compound represented by general formula (b1-1) shown below:
wherein R
X
represents a hydrocarbon group which may have a substituent exclusive of a nitrogen atom; each of Q
2
and Q
3
independently represents a single bond or a divalent linkage group; Y
1
represents an alkylene group or fluorinated alkyl group of 1 to 4 carbon atoms; and Z
+
represents an organic cation exclusive of an ion represented by general formula (w-1).
一种抗蚀组合物,包括基础组分(A),在酸作用下在碱性显影液中表现出改变的溶解度,以及酸发生组分(B),在暴露后产生酸,酸发生组分(B)包括一个由下式(b1-1)表示的化合物组成的酸发生剂(B1):其中RX表示一个可具有除氮原子以外的取代基的碳氢基团;Q2和Q3各自独立地表示单键或双价连接基团;Y1表示1到4个碳原子的烷基或
氟代烷基;Z+表示一种有机阳离子,不包括由通式(w-1)表示的离子。