RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, NOVEL COMPOUND AND METHOD OF PRODUCING THE SAME, AND ACID GENERATOR
申请人:Kawaue Akiya
公开号:US20090068591A1
公开(公告)日:2009-03-12
A compound represented by formula (I); and a compound represented by formula (b1-1):
wherein X represents —O—, —S—, —O—R
3
— or —S—R
4
—, wherein each of R
3
and R
4
independently represents an alkylene group of 1 to 5 carbon atoms; R
2
represents an alkyl group of 1 to 6 carbon atoms, an alkoxy group of 1 to 6 carbon atoms, a halogenated alkyl group of 1 to 6 carbon atoms, a halogen atom, a hydroxyalkyl group of 1 to 6 carbon atoms, a hydroxyl group or a cyano group; a represents an integer of 0 to 2; Q
1
represents an alkylene group of 1 to 12 carbon atoms or a single bond; Y
1
represents an alkylene group of 1 to 4 carbon atoms or a fluorinated alkylene group; M
+
represents an alkali metal ion; and A
+
represents an organic cation.
化合物的化学式(I)代表的化合物;以及化学式(b1-1)代表的化合物:其中X代表—O—,—S—,—O—R3—或—S—R4—,其中R3和R4分别独立代表1至5个碳原子的烷基基团;R2代表1至6个碳原子的烷基基团,1至6个碳原子的烷氧基团,1至6个碳原子的卤代烷基团,卤原子,1至6个碳原子的羟基烷基团,羟基或氰基;a代表0至2的整数;Q1代表1至12个碳原子的烷基基团或单键;Y1代表1至4个碳原子的烷基基团或氟代烷基基团;M+代表碱金属离子;A+代表有机阳离子。