申请人:Personal Genomics, Inc.
公开号:US10566476B2
公开(公告)日:2020-02-18
Some embodiments of the present disclosure provide an optical sensor. The optical sensor includes a semiconductive substrate; a light sensing region on the semiconductive substrate; a waveguide region configured to guide light from a wave insert portion through a waveguide portion and to a sample holding portion; and an interconnect region below the waveguide region, and the interconnect region being disposed above the light sensing region. The waveguide portion includes a first dielectric layer comprising a first refractive index and at least one second dielectric layer comprising a second refractive index, wherein the second refractive index is smaller than the first refractive index.
本公开的一些实施例提供了一种光学传感器。该光学传感器包括半导体衬底;半导体衬底上的光感应区;波导区,配置为引导光从插波部通过波导部到达样品保持部;以及波导区下方的互连区,互连区设置在光感应区上方。波导部分包括包含第一折射率的第一介电层和包含第二折射率的至少一个第二介电层,其中第二折射率小于第一折射率。