2,2,3,3-Tetrafluoro-3-(2,2,3,3,5,5,6,6-octafluoromorpholin-4-yl)propanoic acid

• 分子结构分类: 有机化合物 - 有机氮化合物
• 英文名称: 2,2,3,3-Tetrafluoro-3-(2,2,3,3,5,5,6,6-octafluoromorpholin-4-yl)propanoic acid
• 化学式: C₇HF₁₂NO₃
• 分子量: 375.07
• InChiKey: ZSVYXJMXQZLEJV-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  1.7
• 重原子数：
  23
• 可旋转键数：
  3
• 环数：
  1.0
• sp3杂化的碳原子比例：
  0.86
• 拓扑面积：
  49.8
• 氢给体数：
  1
• 氢受体数：
  16

文献信息

• RINSING FLUID FOR LITHOGRAPHY
  申请人：TOKYO OHKA KOGYO CO., LTD.

  公开号：EP1752827A1

  公开（公告）日：2007-02-14

  The invention provides a novel rinsing fluid which can convert an easily wettable resist pattern surface having a contact angle of 40° or below into one having a contact angle of 70° or above to inhibit pattern collapse effectively and thereby give high-quality products. The rinsing fluid consists of a solution containing at least one fluorine compound soluble in water or alcoholic solvents which is selected from among compounds represented by the general formula (I), those represented by the general formula (II), and those represented by the general formula: Rf'-COOH: wherein R1 and R2 are each optionally substituted C1-5 alkyl whose hydrogen atoms are partially or wholly replaced by fluorine, or R1 and R2 together with the SO2 groups to which they are bonded and the nitrogen atom may form a five- or six-membered ring; Rf is optionally substituted C1-5 alkyl whose hydrogen atoms are partially or wholly replaced by fluorine; m and n are each an integer of 2 or 3; and Rf' is at least partially fluorinated alkyl having 8 to 20 carbon atoms.

  本发明提供了一种新型漂洗液，可将接触角为 40°或以下的易润湿抗蚀剂图案表面转化为接触角为 70°或以上的易润湿抗蚀剂图案表面，从而有效抑制图案塌陷，并由此获得高质量的产品。漂洗液由一种溶液组成，该溶液含有至少一种可溶于水或酒精溶剂的氟化合物，这些氟化合物可从通式 (I) 所代表的化合物中选择、 通式 (II) 所代表的化合物、 和通式Rf'-COOH：其中 R1 和 R2 各为氢原子部分或全部被氟取代的任选取代的 C1-5 烷基，或 R1 和 R2 与它们结合的 SO2 基团和氮原子一起可形成五元或六元环；Rf 为氢原子部分或全部被氟取代的任选取代的 C1-5 烷基；m 和 n 各为 2 或 3 的整数；Rf'为至少部分氟化的烷基，具有 8 至 20 个碳原子。
• Rinsing Fluid for Lithography
  申请人：Koshiyama Jun

  公开号：US20080026975A1

  公开（公告）日：2008-01-31

  The invention provides a novel rinsing fluid which can convert an easily wettable resist pattern surface having a contact angle of 40° or below into one having a contact angle of 70° or above to inhibit pattern collapse effectively and thereby give high-quality products. The rinsing fluid consists of a solution containing at least one fluorine compound soluble in water or alcoholic solvents which is selected from among compounds represented by the general formula (I), those represented by the general formula (II), and those represented by the general formula: R f ′—COOH: wherein R 1 and R 2 are each optionally substituted C 1-5 alkyl whose hydrogen atoms are partially or wholly replaced by fluorine, or R 1 and R 2 together with the SO 2 groups to which they are bonded and the nitrogen atom may form a five- or six-membered ring; R f is optionally substituted C 1-5 alkyl whose hydrogen atoms are partially or wholly replaced by fluorine; m and n are each an integer of 2 or 3; and R f ′ is at least partially fluorinated alkyl having 8 to 20 carbon atoms.
• US7741260B2
  申请人：——

  公开号：US7741260B2

  公开（公告）日：2010-06-22