TITANIUM-ALUMINUM ALLOY DEPOSITION WITH TITANIUM-TETRAHYDROALUMINATE BIMETALLIC MOLECULES
申请人:I'Exploitation des Procedes Georges Claude L'Air Liquide, Societe Anonyme Pour I'Etude et
公开号:US20130295298A1
公开(公告)日:2013-11-07
Disclosed are titanium-tetrahydroaluminates precursors, their method of manufacture, and their use in the deposition of titanium-aluminum-containing films. The disclosed precursors have the formulae Ti(AlH
4
)
3
—X, Ti(AlH
4
)
2
L and Ti(AlH
4
)L
2
. The disclosed precursors may be used to deposit pure titanium-aluminum (TiAl), titanium-aluminum nitride (TiAlN), titanium-aluminum carbide (TiAlC), titanium-aluminum carbonitride (TiAlCN), titanium-aluminum silicide ((TiAl)Si), titanium-aluminum siliconitride ((TiAl)SiN), titanium-aluminum boron ((TiAl)B), titanium-aluminum boron nitride ((TiAl)BN), or titanium-aluminum oxide (TiAlO). or any other titanium-aluminum-containing films. The titanium-aluminum-containing films may be deposited using the disclosed precursors in thermal and/or plasma-enhanced CVD, ALD, pulse CVD or any other type of depositions methods.
本发明涉及
钛四氢铝酸盐前体、其制备方法及其在沉积含
钛铝薄膜中的应用。所披露的前体具有以下
化学式:Ti(
AlH4)3—X,Ti( )2L和Ti( )
L2。所披露的前体可用于沉积纯
钛铝(TiAl)、
钛铝
氮化物(TiAlN)、
钛铝碳化物(TiAlC)、
钛铝碳
氮化物(TiAlCN)、
钛铝
硅化物((TiAl)Si)、
钛铝
硅氮化物((TiAl)SiN)、
钛铝
硼((TiAl)B)、
钛铝
硼氮化物((TiAl)BN)或
钛铝氧化物(TiAlO)等任何含
钛铝薄膜。可以使用所披露的前体在热
化学气相沉积(CVD)、等离子增强
化学气相沉积(P
ECVD)、原子层沉积(ALD)、脉冲
化学气相沉积或任何其他类型的沉积方法中沉积含
钛铝薄膜。