申请人:Echigo Masatoshi
公开号:US20130122423A1
公开(公告)日:2013-05-16
The object is to provide a compound having high dissolvability in a safe solvent and high sensitivity, and also capable of obtaining a good resist pattern shape, a radiation-sensitive composition containing the same, and a resist pattern formation method using the composition. For this purpose, a compound (B) obtained by reaction between a polyphenol based cyclic compound (A) and a compound (C) having a particular structure, a radiation-sensitive composition containing the same, and a resist pattern formation method using the composition are provided.
本发明的目的是提供一种在安全溶剂中具有高溶解度和高灵敏度的化合物,同时还能获得良好的抗蚀图案形状,包含该化合物的辐射敏感组合物以及使用该组合物的抗蚀图案形成方法。为此,提供了通过多酚基环状化合物(A)和具有特定结构的化合物(C)反应得到的化合物(B),包含该化合物的辐射敏感组合物以及使用该组合物的抗蚀图案形成方法。