Using novel amines to stabilize quaternary trialkylalkanolamines
申请人:Huntsman Petrochemical LLC
公开号:US10264785B2
公开(公告)日:2019-04-23
New stabilizers for solutions of choline hydroxide and related quaternary trialkylalkanolamines are disclosed. The stabilizers are alkyl hydroxylamines, hydrazines, hydrazides, or derivates thereof, including compounds containing more than one such functionality. The new stabilizers are effective at concentrations less than about 1000 ppm, and choline hydroxide solutions stabilized with the compounds described herein typically have Gardner Color change less than about 2.0 after six months at reasonable temperatures.
本发明公开了用于氢氧化胆碱和相关季烷基三烷醇胺溶液的新型稳定剂。这些稳定剂是烷基羟胺、肼、酰肼或其衍生物,包括含有一个以上此类官能团的化合物。新稳定剂在浓度小于约 1000 ppm 时有效,用本文所述化合物稳定的氢氧化胆碱溶液在合理温度下 6 个月后的 Gardner Color 变化通常小于约 2.0。
Cleaning compositions for removing post etch residue
申请人:Entegris, Inc.
公开号:US10577567B2
公开(公告)日:2020-03-03
The disclosure relates to a cleaning composition that aids in the removal of post-etch residues in the production of semiconductors. There is provided a stock composition comprising: a tetraalkylammonium hydroxide base or a quaternary trialkylalkanolamine base; a corrosion inhibitor; and a combination of at least two or more polyprotic acids or salts thereof, wherein at least one said polyprotic acid or salt thereof contains phosphorous.
Post-etch residue removal for advanced node beol processing
申请人:Entegris, Inc.
公开号:US10790187B2
公开(公告)日:2020-09-29
The disclosure relates to a cleaning composition that aids in the removal of post-etch residues and aluminum-containing material, e.g., aluminum oxide, in the production of semiconductors that utilize an aluminum-containing etch stop layer. The compositions have a high selectivity for post-etch residue and aluminum-containing materials relative to low-k dielectric materials, cobalt-containing materials and other metals on the microelectronic device.
USING NOVEL AMINES TO STABILIZE QUATERNARY TRIALKYLALKANOLAMINES
申请人:Huntsman Petrochemical LLC
公开号:EP2836479A1
公开(公告)日:2015-02-18
Using Novel Amines to Stabilize Quaternary Trialkylalkanolamines
申请人:Huntsman Petrochemical LLC
公开号:US20150028253A1
公开(公告)日:2015-01-29
New stabilizers for solutions of choline hydroxide and related quaternary trialkylalkanolamines are disclosed. The stabilizers are alkyl hydroxylamines, hydrazines, hydrazides, or derivates thereof, including compounds containing more than one such functionality. The new stabilizers are effective at concentrations less than about 1000 ppm, and choline hydroxide solutions stabilized with the compounds described herein typically have Gardner Color change less than about 2.0 after six months at reasonable temperatures.