申请人:Olin Microelectronic Chemicals, Inc.
公开号:EP0798597A1
公开(公告)日:1997-10-01
Negative working photoresist compositions containing:
a) a polyimide primer containing recurring structural units of formula (I)
in which
A1 stands for an oxygen atom or an NH group,
R1 represents the same or different residues with a photopolymerizable olefin double bond,
[X] indicates the residue of the cyclic dianhydride of the same or different tetracarboxylic acids remaining after removal of the anhydride groups, and
Y indicates the residue of the same or different diamines remaining after removal of the amino groups, as well as
b) a photoinitiator for polymerizing olefin double bonds,
which are characterized by in that they contain
at least one other component c), which is selected from the group consistig of
c1) organosilicon compounds with one or more hydroxyl groups,
c2) compounds of formula (IIa)
in which
A2 and
A3, independent of one another, stand for an oxygen atom or a NR group, in which R indicates a hydrogen atom or a C1-C4 alkyl group, and
[G] stands for a divalent aliphatic or aromatic group, which is unsubstituted or has one or more hydroxyl substituents,
R2 indicates an aryl residue, which has one or more substituents that improve the solubility of the composition in aqueous-alkaline media,
R3 represents a residue with at least one photopolymeriable olefin double bond, and
y as well as
z, independent of one another, indicate the number 0 or 1,
c3) compounds of formula (IIb)
in which
R0 represents the same or different residues with a photopolymerizable olefin double bond, and
[M] represents the residue of the cyclic dianhydride of a tetracarboxylic acid remaining after removal of the anhydride groups, and
c4) mixtures comprised of two or more components selected from components of the type c1), type c2), and type c3).
have the advantage that they can be developed with a developer, which comprises up to 50 to 100 wt.% of an aqueous-alkaline medium, whereby the balance to 100 wt.% is formed by one or more organic solvents.
阴性工作光刻胶组合物,含有
a) 含式 (I) 重复结构单元的聚酰亚胺底漆
其中
A1 代表氧原子或 NH 基团、
R1 代表具有可光聚合烯烃双键的相同或不同残基、
[X]表示去除酸酐基团后剩余的相同或不同四羧酸的环状二酐残留物,以及
Y 表示去除氨基后剩余的相同或不同二胺的残留物,以及
b) 用于聚合烯烃双键的光引发剂、
其特征在于它们含有
至少一种其他成分 c),选自以下组别
c1) 含有一个或多个羟基的有机硅化合物、
c2) 式(IIa)化合物
其中
A2 和
代表氧原子或 NR 基团,其中 R 表示氢原子或 C1-C4 烷基,以及
[G]代表二价脂肪族或芳香族基团,未被取代或具有一个或多个羟基取代基、
R2 表示芳基残基,该残基具有一个或多个取代基,可提高组合物在碱性水介质中的溶解度、
R3 表示具有至少一个可光聚合烯烃双键的残基,以及
y 和
表示数字 0 或 1、
c3) 式(IIb)化合物
其中
R0 代表具有可光聚合烯烃双键的相同或不同残基,以及
[M] 代表去除酸酐基团后剩余的四羧酸环状二酐残基,以及
c4) 由选自 c1)型、c2)型和 c3)型组分的两种或两种以上组分组成的混合物。
它们的优点是可以用显影剂进行显影,显影剂由最多 50 至 100 重量份的碱性水介质组成,其中其余至 100 重量份由一种或多种有机溶剂组成。