New Volatile Strontium and Barium Imidazolate Complexes for the Deposition of Group 2 Metal Oxides
摘要:
We report the synthesis, characterization, and experimental density function theory-derived properties of new volatile strontium and barium imidazolate complexes, which under atomic layer deposition conditions using ozone as a reagent can deposit crystalline strontium oxide at 375 degrees C.