An etchant composition includes phosphoric acid and a silane compound represented by the following Chemical Formula 1:
wherein A is an n-valent radical, L is C
1
-C
5
hydrocarbylene, R
1
to R
3
are independently hydrogen, hydroxy, hydrocarbyl, or alkoxy, in which R
1
to R
3
exist respectively or are connected to each other by a heteroelement, and n is an integer of 2 to 5.
一种蚀刻剂组合物包括
磷酸和由以下
化学式1表示的
硅烷化合物:其中A是一个n价基团,L是C1-C5烃基,R1至R3分别独立地是氢、羟基、烃基或烷氧基,其中R1至R3分别存在或通过异元素连接在一起,并且n是2到5的整数。