申请人:AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L.
公开号:US20150118624A1
公开(公告)日:2015-04-30
The present invention provides a dendrimer compound capable of improving critical dimension uniformity and DOF (depth of focus) margin, and also provides a composition capable of forming an underlayer film. The dendrimer compound comprises a branched chain having a central aromatic skeleton and amide or ester bond, and is contained in the composition for forming an underlayer film.