Synthesis and Characterization of Volatile, Thermally Stable, Reactive Transition Metal Amidinates
作者:Booyong S. Lim、Antti Rahtu、Jin-Seong Park、Roy G. Gordon
DOI:10.1021/ic0345424
日期:2003.12.1
A series of homoleptic metal amidinates of the general type [M(R-R'AMD)(n)](x) (R = (i)Pr, (t)Bu, R' = Me, (t)Bu) has been prepared and structurally characterized for the transition metals Ti, V, Mn, Fe, Co, Ni, Cu, Ag, and La. In oxidation state 3, monomeric structures were found for the metals Ti(III), V(III), and La(III). Bridging structures were observed for the metals in oxidation state 1. Cu(I)
一系列一般类型的[M(R-R'AMD)(n)](x)(R =(i)Pr,(t)Bu,R'= Me,(t)Bu)制备了过渡金属Ti,V,Mn,Fe,Co,Ni,Cu,Ag和La,并对其结构进行了表征。在氧化态3下,发现了金属Ti(III),V(III)的单体结构,和La(III)。观察到处于氧化态1的金属的桥连结构。Cu(I)和Ag(I)保持在桥接的二聚体中,Ag(I)也形成了与二聚体共结晶的三聚体。处于氧化态2的金属以单体或二聚体形式出现。离子半径较小的金属(Co,Ni)是单体金属。较大的金属(Fe,Mn)仅与较大的叔丁基取代的mid基化物形成单体结构,而较小的异丙基取代的mid基化物形成二聚体。发现这些新化合物具有非常适合用作薄膜原子层沉积(ALD)的前体的性能。它们具有高挥发性,高热稳定性,并且与分子氢,沉积纯金属或水蒸气,沉积金属氧化物具有高且适当的自限反应性。