A change in dimension of a pattern formed of a polysilsesquiazane photosensitive composition containing a photoacid generating agent is prevented. The photosensitive composition according to the present invention is characterized by comprising: a modified polysilsesquiazane having a weight average molecular weight of 500 to 200,000 comprising basic constitutional units represented by formula —[SiR
1
(NR
2
)
1.5
]— wherein R
1
's each independently represent an alkyl group having 1 to 3 carbon atoms or a substituted or unsubstituted phenyl group; R
2
's each independently represent hydrogen, an alkyl group having 1 to 3 carbon atoms, or a substituted or unsubstituted phenyl group, up to 50% by mole of said basic constitutional units having been replaced by a linking group other than the silazane bond; a photoacid generating agent; and a basic material.
防止含有光酸生成剂的聚
硅烷基
噻嗪光敏组合物形成的图案尺寸发生变化。根据本发明的光敏组合物,其特征在于包含:一种改性聚
硅烷基
噻嗪,其重量平均分子量为 500 至 200,000 之间,包含由式-[SiR
1
(NR
2
)
1.5
其中 R
1
各自独立地代表具有 1 至 3 个碳原子的烷基或取代或未取代的苯基;R
2
各自独立地代表氢、具有 1 至 3 个碳原子的烷基或取代或未取代的苯基,最多 50%(摩尔)的所述基本结构单元被
硅烷键以外的连接基团取代;一种光酸生成剂;以及一种碱性材料。