申请人:SCREEN Holdings Co., Ltd.
公开号:EP3249682A1
公开(公告)日:2017-11-29
Disclosed is a substrate treating apparatus including the following units: a supplying unit which supplies a process liquid including a sublimable substance in a melt state on a pattern-formed surface of a substrate W; a solidifying unit which solidifies the process liquid on the pattern-formed surface to produce a solidified body; and a sublimating unit which sublimates the solidified body to remove the solidified body from the pattern-formed surface. In this apparatus, the sublimable substance includes a fluorinated carbon compound.
公开了一种基板处理设备,包括以下单元:供应单元,用于在基板 W 的图案形成表面上供应熔融状态的加工液,其中包括可升华物质;凝固单元,用于在图案形成表面上凝固加工液,以产生凝固体;以及升华单元,用于使凝固体升华,以从图案形成表面上去除凝固体。在该装置中,可升华物质包括氟化碳化合物。