申请人:Daxin Materials Corporation
公开号:US10703945B2
公开(公告)日:2020-07-07
A method for temporary bonding workpiece includes steps as follows. A combining step is performed, wherein an adhesive layer is formed on a surface of at least one substrate and/or at least one workpiece. A bonding step is performed, wherein the substrate and the workpiece are bonded by the adhesive layer. A processing step is performed, wherein the workpiece is processed. A debonding step is performed, wherein the adhesive layer is irradiated with a laser so as to separate the workpiece from the substrate. The adhesive layer is formed by an adhesive, the adhesive includes a polymer and a light absorbing material, a content of the polymer in a solid content of the adhesive is in a range of 50 wt % to 98 wt %, a content of the light absorbing material in the solid content of the adhesive is in a range of 2 wt % to 50 wt %.
一种临时粘合工件的方法包括以下步骤。执行组合步骤,其中在至少一个基板和/或至少一个工件的表面形成粘合剂层。执行粘合步骤,其中基底和工件通过粘合剂层粘合。执行加工步骤,其中对工件进行加工。脱粘步骤,用激光照射粘合剂层,使工件与基板分离。粘合剂层由粘合剂形成,粘合剂包括聚合物和光吸收材料,聚合物在粘合剂固体含量中的含量范围为 50 重量%至 98 重量%,光吸收材料在粘合剂固体含量中的含量范围为 2 重量%至 50 重量%。