申请人:JSR Corporation
公开号:EP1045290A2
公开(公告)日:2000-10-18
Disclosed are a composition for a resist underlayer film excellent in reproducibility of a resist pattern, excellent in adhesion to a resist, excellent in resistance to a developing solution used after exposure of the resist and decreased in film loss in oxygen ashing of the resist; and a method for producing the same, the composition comprising:
both or either of a hydrolysate and a condensate of (A) at least one compound selected from the group consisting of (A-1) a compound represented by the following general formula (1):
R1aSi(OR2)4-a (1)
wherein R1 represents a hydrogen atom, a fluorine atom or a univalent organic group, R2 represents a univalent organic group, and a represents an integer of 0 to 2, and (A-2) a compound represented by the following general formula (2):
R3b(R4O)3-bSi-(R7)d-Si(OR5)3-cR6c (2)
wherein R3, R4, R5 and R6, which may be the same or different, each represent univalent organic groups, b and c, which may be the same or different, each represent integers of 0 to 2, R7 represents an oxygen atom or -(CH2)n-, d represents 0 or 1, and n represents an integer of 1 to 6; and
(B) a compound generating an acid by ultraviolet irradiation and/or heating.
本发明公开了一种用于抗蚀剂底层薄膜的组合物,该组合物在抗蚀剂图案的再现性、与抗蚀剂的粘附性、对抗蚀剂曝光后使用的显影液的耐受性方面表现优异,并且在抗蚀剂的氧灰化过程中减少了薄膜的损失;以及生产该组合物的方法,该组合物包括
(A) 至少一种选自以下组别的化合物的水解物和缩合物 (A-1) 由以下通式(1)代表的化合物:
R1aSi(OR2)4-a (1)
其中 R1 代表氢原子、氟原子或单价有机基团,R2 代表单价有机基团,a 代表 0 至 2 的整数,以及 (A-2) 由下式通式 (2) 代表的化合物:
R3b(R4O)3-bSi-(R7)d-Si(OR5)3-cR6c (2)
其中 R3、R4、R5 和 R6(可以相同或不同)分别代表单价有机基团,b 和 c(可以相同或不同)分别代表 0 至 2 的整数,R7 代表氧原子或-(CH2)n-,d 代表 0 或 1,n 代表 1 至 6 的整数;以及
(B) 通过紫外线照射和/或加热生成酸的化合物。