Embodiments in accordance with the present invention provide for norbornane-type ballast materials, norbornane-type photoactive compounds derived from such ballast materials and alkali-soluble positive-tone polymer compositions that encompass such norbornane-type photoactive compounds and one of a PBO or PNB resin.
NORBORNANE-BASED PAC BALLAST AND POSITIVE-TONE PHOTOSENSITIVE RESIN COMPOSITION ENCOMPASSING THE PAC
申请人:Promerus, LLC
公开号:EP2622410A1
公开(公告)日:2013-08-07
NORBORNANE-TYPE ARYLOL COMPOUND AND CORRESPONDING PHOTOACTIVE COMPOUND, POSITIVE-TONE PHOTOSENSITIVE RESIN COMPOSITION ENCOMPASSING THE PHOTOACTIVE COMPOUND
申请人:Sumitomo Bakelite Co., Ltd.
公开号:EP2622410B1
公开(公告)日:2014-08-20
Photosensitive polyimide compositions
申请人:Dueber E. Thomas
公开号:US20070083016A1
公开(公告)日:2007-04-12
A photosensitive resin composition comprising a pre-imidized aromatic polyimide, which when coated on a silicon wafer, has a light transmittance at a wavelength of 365 nm of at least 1% and imparts low residual stress after cure. The composition can be patterned through I-line exposure followed by development with organic or alkaline solutions, and can be cured at relatively mild temperature to yield low-stress polyimide patterns. Electronic components having the polyimide patterns have high reliability.