申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US10457761B2
公开(公告)日:2019-10-29
A polymer comprising recurring units having an acid generator bound to the backbone, and recurring units having an optionally acid labile group-substituted carboxyl group and/or recurring units having an optionally acid labile group-substituted hydroxyl group is obtained by polymerizing corresponding monomers under such illumination that the quantity of light of wavelength up to 400 nm is up to 0.05 mW/cm2. The polymer avoids photo-decomposition of the acid generator during polymerization and concomitant deprotection reaction of the acid labile group when used in positive resist compositions. A pattern with high dissolution contrast and rectangularity is formed after development.
在波长不超过 400 纳米的光照下,使相应的单体聚合,使光照量不超过 0.05 mW/cm2,可获得一种聚合物,该聚合物包含与骨架结合有酸发生器的递归单元,以及具有可选的酸标签基取代的羧基和/或具有可选的酸标签基取代的羟基的递归单元。这种聚合物在聚合过程中可避免酸发生器的光分解,以及在正抗蚀剂组合物中使用时可避免随之而来的酸性基团的脱保护反应。显影后形成的图案具有较高的溶解对比度和矩形度。