A stacked film, a method for the production of the stacked film, an insulating film comprising the stacked film, and a substrate for semiconductor, using the insulating film. The stacked film comprises films of two or more kinds of alkoxysilane hydrolysis condensates having 5 nm or more difference in a mean radius of gyration, or films of alkoxysilane hydrolysis condensate having 0.3 or more difference in the dielectric constant. The stacked film is obtained by applying a coating solution comprising (B) a compound having a mean radius of gyration of less than 10 nm, and then applying a coating solution comprising (A) a compound having a mean radius of gyration of from 10 to 30 nm, followed by heating. The stacked film provides a dielectric film (substrate for semiconductor) having superior adhesion to a CVD film.
一种叠层薄膜、一种生产叠层薄膜的方法、一种由叠层薄膜构成的绝缘薄膜,以及一种使用该绝缘薄膜的半导体衬底。叠层薄膜包括两种或两种以上平均回转半径相差 5 nm 或更多的烷氧基
硅烷水解缩合物薄膜,或介电常数相差 0.3 或更多的烷氧基
硅烷水解缩合物薄膜。叠层薄膜的获得方法是先涂覆平均回转半径小于 10 纳米的化合物(B),再涂覆平均回转半径为 10 至 30 纳米的化合物(A),然后加热。叠层薄膜可提供与 CVD 薄膜具有优异附着力的电介质薄膜(半导体衬底)。