An onium salt compound having a cation moiety of the following formula (1) is disclosed.
wherein A represents I or S, m is 1 or 2, n is 0 or 1, x is 1-10, and Ar1 and Ar2 are (substituted) aromatic hydrocarbon group, and P represents —O—SO
2
R, —O—S(O)R, or —SO
2
R, wherein R represents a hydrogen atom, a (substituted) alkyl group, or a (substituted) alicyclic hydrocarbon group. The onium salt compound is suitable as a photoacid generator for photoresists of a positive-tone radiation-sensitive resin composition. The positive-tone radiation-sensitive resin composition containing this compound is useful as a chemically-amplified photoresist exhibiting high resolution at high sensitivity, responsive to various radiations, and having outstanding storage stability.
本发明揭示了一种具有以下式(1)的阳离子部分的醇盐化合物。其中,A代表I或S,m为1或2,n为0或1,x为1-10,Ar1和Ar2为(取代)
芳香烃基,P代表-O-SO2R,-O-S(O)R或-SO2R,其中R代表氢原子,(取代)烷基或(取代)脂
环烃基。该醇盐化合物适用于用于正向调节辐射敏感
树脂组成物的光酸发生剂。含有该化合物的正向调节辐射敏感
树脂组成物是一种
化学放大的光刻胶,具有高灵敏度和高分辨率,对各种辐射具有响应性,并具有优异的储存稳定性。