申请人:JEONG Eun Jeong
公开号:US20100148229A1
公开(公告)日:2010-06-17
An insulating resin composition is provided. The insulating resin composition includes (A) a silicon-based polymer having either primary or secondary amine groups or both, (B) an organometallic compound, and (C) a solvent. The physicochemical properties of the insulating resin composition are maintained during processing steps for the fabrication of a semiconductor device. Therefore, the use of the insulating resin composition prevents deterioration of the characteristics of the semiconductor device arising from defects, spots, aggregates, and the like, in an insulating film and reduces the hysteresis of the semiconductor device to improve the characteristics of the semiconductor device.
提供了一种绝缘树脂组合物。该绝缘树脂组合物包括(A)具有一级或二级胺基团或两者的硅基聚合物,(B)有机金属化合物和(C)溶剂。在制造半导体器件的加工步骤中,绝缘树脂组合物的物理化学性质得以维持。因此,使用该绝缘树脂组合物可以防止由于绝缘膜中的缺陷、斑点、聚集物等引起的半导体器件特性的恶化,并减少半导体器件的滞后性以提高其特性。