There is disclosed a photoresist composition comprising a light-sensitive, quinone diazide polymer, a binder and a benzene monomer trisubstituted with a diazo-naphthoquinone-sulfonyloxy group. The composition is characterized in that the diazonaphthoquinone-sulfonyloxy group occupies the 1,2,4-positions on the benzene ring, whereby improved solubility is achieved.
本发明公开了一种光致抗蚀剂组合物,该组合物包含一种光敏重氮化醌聚合物、一种粘合剂和一种用重氮-
萘醌-磺酰氧基三取代的苯单体。该组合物的特点是重氮
萘醌-磺酰氧基基团占据苯环上的 1、2、4-位,从而提高了溶解性。