申请人:Koltsova, Anastasia Adrianovna
公开号:EP2014735A2
公开(公告)日:2009-01-14
The invention relates to the semiconductor device making technology, namely, to methods and compositions for the technology for manufacturing semiconductor devices and integrated microcircuits, particularly to the technology for creating new adhesive electroconductive compositions.
The task of the claimed invention is in providing a polymer anisotropic electroconductive composite adhesive material ensuring increased reliability of positive characteristic replication, high electroconductivity and high anisotropy in the direction perpendicular to the adhesion plane, as well as a method of adhering.
The set task is solved by creating a polymer anisotropic electroconductive composite adhesive material based on dielectrics, among which the necessary component ensuring high anisotropy are agents having unstable electron molecular state, which electroconductivity depends on action of external physical fields, and which are characterized by high polarizability and/or bistable electron energy structure with regard to the process of excess electron capture. Other components carry out important, but ancillary functions (e.g., increasing of strength, adhesion, workability, etc.). Novelty is in that such a polymer composite material is created based only on dielectrics, among which must be necessary components having features represented above.
本发明涉及半导体器件制造技术,即涉及半导体器件和集成微电路制造技术的方法和组合物,特别是涉及制造新型粘合导电组合物的技术。
本发明的任务是提供一种聚合物各向异性导电复合粘合材料,确保提高正特性复制的可靠性、高导电性和垂直于粘合平面方向的高各向异性,以及一种粘合方法。
要解决上述问题,就必须在电介质的基础上制造一种聚合物各向异性导电复合粘合材料,其中确保高各向异性的必要成分是具有不稳定电子分子状态的介质,这种介质的导电性取决于外部物理场的作用,其特点是在过量电子捕获过程中具有高极化性和/或双稳态电子能量结构。其他成分具有重要的辅助功能(如增加强度、粘附性、可加工性等)。新颖之处在于,这种聚合物复合材料仅以电介质为基础,其中必须包含具有上述特征的必要成分。