A method for producing a fluorine-containing polyimide film excelling in heat resistance, resistance to chemicals, water repellency, dielectric properties, electrical properties, and optical properties and a spin coater suitable for the method are to be provided. A method for the production of a fluorine-containing polyimide film which comprises forming a coating film of a fluorine-containing polyimide precursor in an atmosphere having a relative humidity thereof adjusted to a level of not more than 50 RH % and then subjecting the fluorine-containing polyimide precursor to heat treatment thereby forming a fluorine-containing polyimide film is provided. By adjusting the relative humidity in accordance with this method, the fluorine-containing polyimide precursor can be prevented from being decomposed by the absorption of moisture and consequently prevent effectively the fluorine-containing polyimide film from forming piriform spots and scratches. Further, by forming the coating film while keeping the coating film sprayed with a gas particularly during the course of spin coating thereby giving rise to a layer of air flow on the coating film, misty substances of the coating solution generated within the spin coater can be prevented from adhering again to the coating film and consequently ensure the production of a coating film of uniform quality. This formation of the layer of air flow can be facilitated by providing the spin coater with a lid and furnishing the lid with a gas feed port.
                            本发明将提供一种生产耐热性、耐
化学性、防
水性、介电性能、电性能和光学性能优异的含
氟聚
酰亚胺薄膜的方法,以及一种适用于该方法的旋涂机。本发明提供了一种生产含
氟聚
酰亚胺薄膜的方法,该方法包括在相对湿度调节至不超过 50 RH % 的气氛中形成含
氟聚
酰亚胺前体涂膜,然后对含
氟聚
酰亚胺前体进行热处理,从而形成含
氟聚
酰亚胺薄膜。按照这种方法调节相对湿度,可以防止含
氟聚
酰亚胺前体因吸湿而分解,从而有效防止含
氟聚
酰亚胺薄膜形成盗形斑和划痕。此外,在形成涂膜的同时,特别是在旋涂过程中保持涂膜喷有气体,从而在涂膜上形成气流层,这样就可以防止旋涂机内产生的涂膜溶液中的雾状物质再次附着在涂膜上,从而确保生产出质量均匀的涂膜。通过在旋涂机上安装盖子并在盖子上安装进气口,可以促进气流层的形成。