BASE REACTIVE PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME
申请人:AQAD Emad
公开号:US20120129108A1
公开(公告)日:2012-05-24
This invention relates to new photoacid generator compounds and photoresist compositions that comprise such compounds. In particular, the invention relates to photoacid generator compounds that comprise base-cleavable groups.
Base reactive photoacid generators and photoresists comprising same
申请人:Rohm and Haas Electronic Materials LLC
公开号:EP2452932A2
公开(公告)日:2012-05-16
This invention relates to new photoacid generator compounds and photoresist compositions that comprise such compounds. In particular, the invention relates to photoacid generator compounds that comprise base-cleavable groups.