Naphthalin-2,7-dicarbonsaeure-dibutylester | 94686-83-6

• 分子结构分类: 有机化合物 - 苯类化合物 - 萘
• 英文名称: Naphthalin-2,7-dicarbonsaeure-dibutylester
• 英文别名: Dibutyl naphthalene-2,7-dicarboxylate
• CAS: 94686-83-6
• 化学式: C₂₀H₂₄O₄
• 分子量: 328.408
• InChiKey: PIIISTWPIPOMBG-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  6.8
• 重原子数：
  24
• 可旋转键数：
  10
• 环数：
  2.0
• sp3杂化的碳原子比例：
  0.4
• 拓扑面积：
  52.6
• 氢给体数：
  0
• 氢受体数：
  4

文献信息

• ORGANIC BOTTOM ANTIREFLECTIVE COATING COMPOSITION FOR NANOLITHOGRAPHY
  申请人：Rohm and Haas Electronic Materials Korea Ltd.

  公开号：US20150185614A1

  公开（公告）日：2015-07-02

  An anti-reflective coating composition is provided. The anti-reflective coating composition of the present invention can be useful in preventing a pull-back phenomenon in which an anti-reflective coating layer tears on a corner of a pattern of a substrate during a heat curing process and improving gap-filling performance of the pattern since a crosslinker is attached to a polymer in the composition and the content of the low-molecular-weight crosslinker in the composition is minimized to regulate a heat curing initiation temperature.