A polymer comprising recurring units derived from vinylanthraquinone, recurring units derived from acid labile group-substituted hydroxystyrene, and recurring units derived from hydroxystyrene is provided. The polymer is used as a base resin to formulate a positive resist composition having a high resolution and minimal LER.
本发明提供了一种聚合物,它包含由
乙烯基蒽醌衍生的递归单元、由酸性基团取代的羟基
苯乙烯衍生的递归单元以及由羟基
苯乙烯衍生的递归单元。该聚合物可用作基础
树脂,配制出具有高分辨率和最小 LER 的正抗蚀剂组合物。