4-t-butylphenyl.diphenylsulfonium perfluoro-n-octanesulfonate | 343629-51-6

• 分子结构分类: 有机化合物 - 有机卤素化合物 - 卤代烷
• 英文名称: 4-t-butylphenyl.diphenylsulfonium perfluoro-n-octanesulfonate
• 英文别名: (4-Tert-butylphenyl)-diphenylsulfanium;1,1,2,2,3,3,4,4,5,5,6,6,7,7,8,8,8-heptadecafluorooctane-1-sulfonate
• CAS: 343629-51-6
• 化学式: C₈F₁₇O₃S*C₂₂H₂₃S
• 分子量: 818.616
• InChiKey: LWUCQZDYSYWSNO-UHFFFAOYSA-M

计算性质

• 辛醇/水分配系数(LogP)：
  10.58
• 重原子数：
  52
• 可旋转键数：
  10
• 环数：
  3.0
• sp3杂化的碳原子比例：
  0.4
• 拓扑面积：
  66.6
• 氢给体数：
  0
• 氢受体数：
  20

文献信息

• POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS
  申请人：NISHI Tsunehiro

  公开号：US20100062374A1

  公开（公告）日：2010-03-11

  A positive resist composition comprises (A) a resin component which becomes soluble in an alkaline developer under the action of an acid and (B) an acid generator. The resin (A) is a polymer comprising recurring units containing a non-leaving hydroxyl group represented by formula (1) wherein R 1 is H, methyl or trifluoromethyl, X is a single bond or methylene, m is 1 or 2, and the hydroxyl group attaches to a secondary carbon atom. The composition is improved in resolution when processed by lithography.

  一种正性光刻胶组合物包括（A）在酸的作用下在碱性显影剂中变得可溶的树脂组分和（B）酸发生剂。树脂（A）是一种聚合物，包含由式（1）表示的非离去羟基的重复单元，其中R1为H、甲基或三氟甲基，X为单键或亚甲基，m为1或2，并且羟基连接到次级碳原子。当通过光刻工艺处理时，该组合物在分辨率方面得到改善。
• Fluoroalcohol preparation method, fluorinated monomer, polymer, resist composition and patterning process
  申请人：Hasegawa Koji

  公开号：US20070179309A1

  公开（公告）日：2007-08-02

  Fluoroalcohol compounds of formula (4) are prepared by reacting a fluorine compound of formula (1) with reducing agents or organometallic reagents of formulas (2) and (3) wherein R 1 is H or a monovalent C 1 -C 20 hydrocarbon group in which any —CH 2 — moiety may be replaced by —O— or —C(═O)—, R 2 is H or a monovalent C 1 -C 6 hydrocarbon group, R 3 and R 4 are H or a monovalent C 1 -C 8 hydrocarbon group, and M 1 is Li, Na, K, Mg, Zn, Al, B, or Si. From the fluoroalcohol compounds, fluorinated monomers can be produced in a simple and economic way, which are useful in producing polymers for the formulation of radiation-sensitive resist compositions.

  通过将化学式（1）的氟化合物与化学式（2）和（3）的还原剂或有机金属试剂反应制备化学式（4）的氟醇化合物，其中R1是H或一价的碳1-碳20烃基，其中任何一个—CH2—基团可能被—O—或—C(═O)—替代，R2是H或一价的碳1-碳6烃基，R3和R4是H或一价的碳1-碳8烃基，M1是Li、Na、K、Mg、Zn、Al、B或Si。通过这些氟醇化合物，可以简单经济地生产氟化单体，这些单体在制备用于辐射敏感抗蚀剂组合物的聚合物中非常有用。
• FLUORINATED MONOMER, FLUORINATED POLYMER, RESIST COMPOSITION AND PATTERNING PROCESS
  申请人：HASEGAWA Koji

  公开号：US20090035699A1

  公开（公告）日：2009-02-05

  Fluorinated monomers of formula (1) are useful in producing polymers for the formulation of radiation-sensitive resist compositions. R 1 is H or monovalent C 1 -C 20 hydrocarbon group, R 2 is H, F, methyl or trifluoromethyl, R 3 and R 4 are H or a monovalent C 1 -C 8 hydrocarbon group, or R 3 and R 4 may form an aliphatic hydrocarbon ring, and A is a divalent C 1 -C 6 hydrocarbon group.

  式（1）的氟化单体在制备用于辐射敏感抗蚀组合物的聚合物方面很有用。 R1是H或一价的C1-C20碳氢基团，R2是H，F，甲基或三氟甲基，R3和R4是H或一价的C1-C8碳氢基团，或R3和R4可以形成脂肪烃环，A是二价的C1-C6碳氢基团。
• Novel anthracene derivative and radiation-sensitive resin composition
  申请人：——

  公开号：US20030194634A1

  公开（公告）日：2003-10-16

  A novel anthracene derivative useful as an additive to a radiation-sensitive resin composition is disclosed. The anthracene derivative has the following formula (1), 1 wherein R 1 groups individually represent a hydroxyl group or a monovalent organic group having 1-20 carbon atoms, n is an integer of 0-9, X is a single bond or a divalent organic group having 1-12 carbon atoms, and R 2 represents a monovalent acid-dissociable group. The radiation-sensitive resin composition comprises the anthracene derivative of the formula (1), a resin insoluble or scarcely soluble in alkali, but becomes alkali soluble in the presence of an acid, and a photoacid generator. The composition is useful as a chemically-amplified resist for microfabrication utilizing deep ultraviolet rays, typified by a KrF excimer laser and ArF excimer laser.

  揭示了一种作为辐射敏感树脂组合物添加剂有用的新型蒽衍生物。该蒽衍生物具有以下化学式（1），其中R1基分别表示一个羟基或具有1-20个碳原子的一价有机基团，n是0-9的整数，X是一个单键或具有1-12个碳原子的二价有机基团，R2表示一价酸可解离基团。辐射敏感树脂组合物包括化学式（1）的蒽衍生物，一种在碱性条件下不溶或几乎不溶但在存在酸时变为碱溶的树脂，以及光酸发生剂。该组合物可用作化学放大光刻胶，用于利用KrF准分子激光和ArF准分子激光等深紫外线进行微加工。
• Ester compounds and their preparation, polymers, resist compositions and patterning process
  申请人：Ohashi Masaki

  公开号：US20080008965A1

  公开（公告）日：2008-01-10

  Novel ester compounds having formulae (1) to (4) wherein A 1 is a polymerizable functional group having a carbon-carbon double bond, A 2 is oxygen, methylene or ethylene, R 1 is a monovalent hydrocarbon group, R 2 is H or a monovalent hydrocarbon group, any pair of R 1 and/or R 2 may form an aliphatic hydrocarbon ring, R 3 is a monovalent hydrocarbon group, and n is 0 to 6 are polymerizable into polymers. Resist compositions comprising the polymers as a base resin are thermally stable and sensitive to high-energy radiation, have excellent sensitivity and resolution, and lend themselves to micropatterning with electron beam or deep-UV.

  具有以下化学式（1）至（4）的新酯化合物，其中A1是具有碳-碳双键的可聚合官能团，A2是氧、亚甲基或乙烯基，R1是一价碳氢基团，R2是氢或一价碳氢基团，任意一对R1和/或R2可能形成脂肪烃环，R3是一价碳氢基团，n为0至6，可聚合成聚合物。作为基础树脂的聚合物组成物具有热稳定性，并对高能辐射敏感，具有出色的敏感度和分辨率，并适用于电子束或深紫外微图案化。