申请人:Sato Junko
公开号:US08492562B2
公开(公告)日:2013-07-23
Provided are a polymerizable compound shown below which is useful as a raw material for a polymer having less swelling in developing, a polymer obtained by polymerizing a raw material containing the above polymerizable compound, a photoresist composition which contains the above polymer and which is improved in LWR and an efficient production process for the polymerizable compound described above:
wherein n represents an integer of 0 to 2; R1 represents a hydrogen atom, methyl or trifluoromethyl; R2, R3, R4, R5, R6, R7, R8, R9 and R10 represent a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or the like; W represents an alkylene group having 1 to 10 carbon atoms or the like; and Y1 and Y2 represent an oxygen atom or a sulfur atom.
提供一种聚合物化合物,如下所示,可用作具有较少膨胀的聚合物的原材料,通过聚合含有上述聚合物化合物的原材料得到的聚合物,包含上述聚合物并在LWR方面改进的光阻组合物,以及上述聚合物化合物的高效生产工艺:其中n表示0到2的整数;R1表示氢原子、甲基或三氟甲基;R2、R3、R4、R5、R6、R7、R8、R9和R10表示氢原子、具有1到6个碳原子的烷基或类似物;W表示具有1到10个碳原子的烷基或类似物;Y1和Y2表示氧原子或硫原子。