申请人:TORAY INDUSTRIES, INC.
公开号:EP0418870A2
公开(公告)日:1991-03-27
A radiation-sensitive composition is described, which is comprised of
(a) a polymer containing repeating units [1] represented by the general formula
wherin R₁ is a trivalent or tetravalent organic residue having at least two carbon atoms, R₂ is a divalent organic residue having at least two carbon atoms, R₃ is hydrogen or an alkali metal counter ion, and n is 1 or 2;
(b) a compound containing a radiation-dimerizable or radiation-polymerizable unsaturated bond and an amino group or a quaternary ammonium salt;
(c) a non-alicyclic organic compound having a boiling point not lower than 120°C, containing at least one functional linkage selected from the group consisting of ester linkage, ether linkage and ketone linkage, and containing neither amino group nor hydroxyl group; and
(d) optionally a sensitizer.
This composition can greatly improve the developability and can give heat-resistant polyimide relief patterns with a good edge sharpness and good mechanical properties.
描述了一种辐射敏感组合物,它包括
(a) 含有通式[1]代表的重复单元的聚合物
其中 R₁ 是至少具有两个碳原子的三价或四价有机残基,R₂ 是至少具有两个碳原子的二价有机残基,R₃ 是氢或碱金属反离子,n 是 1 或 2;
(b) 含有可辐射二聚体或可辐射聚合的不饱和键和氨基或季铵盐的化合物;
(c) 沸点不低于 120℃的非脂环有机化合物,含有至少一种选自酯连接、醚连接 和酮连接的官能连接,且既不含氨基也不含羟基;及
(d) 可选的敏化剂。
这种组合物能大大提高显影性,并能制作出边缘锐利、机械性能良好的耐热聚酰亚胺浮雕图案。