申请人:LOCTITE (IRELAND) Ltd.
公开号:EP0233747A2
公开(公告)日:1987-08-26
A method for applying a polymeric resist coating of very high molecular weight to a suitable substrate without the necessity of elaborate purification steps and for ensuring adequate coverage of raised regions in three-dimensionally patterned substrates. The method comprises exposing the substrate to be coated to the vapor of an anionically polymerizable monomer of the formula:
CHR=CXY
where X and Y are strong electron withdrawing groups and R is H or, provided that X and Y are both -CN, C₁-C₄ alkyl for sufficient time to deposit a polymerizable coating thereon. Particularly preferred monomers are 2-cyanoacrylate esters. The monomer condenses and polymerizes on the surface of the substrate to give a highly uniform high molecular weight polymeric coating which is useful as a resist coating in lithographic processes employing plasma or acid etch techniques.
一种将分子量极高的聚合物抗蚀涂层涂覆到合适基底上的方法,无需复杂的净化步骤,并可确保充分覆盖三维图案基底上的凸起区域。该方法包括将待涂覆的基底暴露在式中阴离子可聚合单体的蒸汽中:
CHR=CXY
其中 X 和 Y 是强取电子基团,R 是 H 或(如果 X 和 Y 都是-CN)C₁-C₄ 烷基,将其暴露足够长的时间以在其上沉积可聚合涂层。特别优选的单体是 2-氰基丙烯酸酯。单体在基底表面凝结聚合,形成高度均匀的高分子量聚合涂层,可在采用等离子或酸蚀刻技术的平版印刷工艺中用作抗蚀涂层。