申请人:JSR CORPORATION
公开号:US20030091838A1
公开(公告)日:2003-05-15
A composition for film formation which comprises:
(A) a product of hydrolysis and condensation obtained by hydrolyzing and condensing at least one silane compound selected from the group consisting of compounds represented by the formula (1), compounds represented by the formula (2), and compounds represented by the formula (3) in the presence of water and an ammonium compound, and
(B) an organic solvent.
一种用于成膜的组合物,它包括
(A) 至少一种硅烷化合物的水解和缩合产物,该硅烷化合物选自由式(1)、式(2)和式(3)所代表的化合物组成的组,在水和铵化合物存在下水解和缩合得到,以及
(B) 有机溶剂。